a wafer metrology consortium under MAGNET

Metro450 Members Publications

Metro450 Members Publications

Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement

26 February, 2017

Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement
AU: Ney, M., Safrani, A., & Abdulhalim, I.

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Experimental study of forces on freely moving spherical particles during resuspension into turbulent flow

8 February, 2017

Experimental study of forces on freely moving spherical particles during resuspension into turbulent flow
AU: Traugott, H., & Liberzon, A.

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On Energy-Optimal and Time-Optimal Precise Displacement of Rigid Body with Friction

5 February, 2017

On Energy-Optimal and Time-Optimal Precise Displacement of Rigid Body with Friction
AU: Ilya Ioslovich, Per-Olof Gutman, Ari Berger, Shai Moshenberg

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Piezo-based miniature high resolution stabilized gimbal

5 February, 2017

Piezo-based miniature high resolution stabilized gimbal
AU: Karasikov, N., Peled, G., Yasinov, R., & Yetkariov, R.

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Miniature precision stage for optics on LEO satellites

5 February, 2017

Miniature precision stage for optics on LEO satellites
AU: N. Karasikov

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Crystalline damage in silicon wafers and 'rare event' failure introduced by low-energy mechanical impact

30 January, 2017

Crystalline damage in silicon wafers and 'rare event' failure introduced by low-energy mechanical impact
AU: . Atrash, I. Meshi, A. Krokhmal, P. Ryan, M. Wormington, and D. Sherman

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A rotational traveling wave based levitation device – Modelling, design, and control

26 January, 2017

A rotational traveling wave based levitation device – Modelling, design, and control
AU: Ran Gabaia, Dotan Ilssara, Ran Shahama, Nadav Cohenb, Izhak Bucher

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Modeling and closed loop control of near-field acoustically levitated objects

26 January, 2017

Modeling and closed loop control of near-field acoustically levitated objects
AU: Dotan Ilssara, Izhak Buchera, Henryk Flashner

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A novel approach to the computation of polyhedral invariant sets for constrained systems

25 January, 2017

A novel approach to the computation of polyhedral invariant sets for constrained systems
AU: Sheer, S., & Gutman, P. O.

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Instantaneous high-resolution focus tracking and a vibrometery system using parallel phase shift interferometry

14 August, 2016

AU: Michael Ney, Avner Safrani and Ibrahim Abdulhlaim

SO: Journal of Optics, 2016

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K-Means over Incomplete Datasets using Mean Euclidean Distance

28 June, 2016

K-Means over Incomplete Datasets using Mean Euclidean Distance

AU: Loai AbdAllah and Ilan Shimshoni

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Lookahead Selective Sampling for Incomplete Data

28 June, 2016

Lookahead Selective Sampling for Incomplete Data

AU: Loai AbdAllah and Ilan Shimshoni

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Performance and Applications of L1B2 Ultrasonic Motors

23 June, 2016

Performance and Applications of L1B2 Ultrasonic Motors

AU: Gal Peled, Roman Yasinov and Nir Karasikov / Nanomotion
SO: Actuators 2016

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On the optimal control of the rigid body precise movement: Is energy optimality the same as time optimality?

17 April, 2016

On the optimal control of the rigid body precise movement: Is energy optimality the same as time optimality?

AU: Gutman, P.-O., Ioslovich, I., Moshenberg, S.
SO: SIAM Conference on Control and Its Applications 2015

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Time optimal trajectory planning with feed- forward and friction compensation

17 April, 2016

Time optimal trajectory planning with feed- forward and friction compensation

AU: Berger, A., Ioslovich, I., Gutman, P.O.
SO: American Control Conference (ACC 2015) Proceedings, Chicago, IL, USA, pp. 4143-4148

On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality

17 April, 2016

On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality

AU: Ioslovich, I., Moshenberg, S., Gutman, P.O.
SO: Proceedings of 24th International Symposium on Industrial Electronics (IEEE ISIE 2015), June 3-5, Buzios, Brazil, pp. 95-99

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Productivity Enhancement in Metrology

14 April, 2016

AU: Menachem Shoval
SO: Semiconductor Technology Conference (STC), 2015

Wafer Metrology in the 300 - 450 mm / sub 10 era

14 April, 2016

AU: Ron Naftali
SO: Semiconductor Technology Conference (STC)

Dimensional & Material metrology to meet industry growing needs

14 April, 2016

Dimensional & Material metrology to meet industry growing needs

AU: Shay Wolfling
SO: Semiconductor Technology Conference (STC)

Sampling Optimization For 450mm Wafers

14 April, 2016

AU: Idan Kaizerman
SO: Semiconductor Technology Conference (STC), 2015

Analysis and In-Line Monitoring of Non-Visual Crystalline Defects (cNVDs) in Silicon Wafers to Identify Wafers at Risk from breakage

14 April, 2016

Analysis and In-Line Monitoring of Non-Visual Crystalline Defects (cNVDs) in Silicon Wafers to Identify Wafers at Risk from breakage

AU: Fouad Atrash
SO: Semiconductor Technology Conference (STC), 2015

Wafer Handling Challenges

14 April, 2016

AU: Nir Karasikov
SO: Semiconductor Technology Conference (STC), 2015

Identification and modeling of contact dynamics of precise direct drive stages

13 April, 2016

Identification and modeling of contact dynamics of precise direct drive stages

Authors: Michael Feldman, Yaron Zimmerman, Michael Gissin and Izhak Bucher
Source: Journal of Dynamic Systems, Measurement, and Control, 2016

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On the slow dynamics of near-field acoustically levitated objects under High excitation frequencies, Journal of Sound and Vibration

13 April, 2016

On the slow dynamics of near-field acoustically levitated objects under High excitation frequencies, Journal of Sound and Vibration

Authors: Dotan Ilssar, Izhak Bucher
Source: Journal of Sound and Vibration, Volume 354, 13 October 2015, Pages 154-166

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Nonlinear vibrating system identification via Hilbert decomposition

13 April, 2016

Nonlinear vibrating system identification via Hilbert decomposition

Authors: Michael Feldman, Simon Braun
Source: Mechanical Systems and Signal Processing, 2016

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Biomimetic wall-shaped hierarchical microstructure for gecko-like attachment

12 April, 2015

Authors: Haytam Kasem,a Alexey Tsipenyuka and Michael Varenberg
Source: Soft Matter (2015), 15(11), 2909-2915

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Multi-Target Shrinkage Estimation for Covariance Matrices

24 October, 2014

Authors: Tomer Lancewicki & Mayer Aladjem
Source: IEEE Transactions on Signal Processing (2014 in press)

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Patent Application - Method and System For Non-Contact Levitation

8 September, 2014

Inventor: Izhak Bucher
Abstract:The present invention, in some embodiments thereof, relates to non-contact levitation and, more particularly, but not exclusively, to a method and system for acoustic levitation.

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Optical CD Metrology and the Metro450 Program

21 August, 2014

Author: Shay Wolfling, NOVA

Locally multidimensional scaling by creating neighborhoods in diffusion maps

7 August, 2014

Authors: Tomer Lancewicki & Mayer Aladjem
Source: Neurocomputing (2014), 139, 382–396

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Time-Optimal Control of Wafer Stage Positioning using Simplified Models

7 August, 2014

Authors:Ilya Ioslovich and Per-Olof Gutman
Source: Contemporary Mathematics

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Hilbert transform methods for nonparametric identification of nonlinear time varying vibration systems

3 August, 2014

AU: Michael Feldman
SO: Mechanical Systems and Signal Processing (2014), 47(1-2), 66-77

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Optically Induced Self-Excited Oscillations in an On-Fiber Optomechanical Cavity

1 June, 2014

Authors: Ilya Baskin, D. Yuvaraj, Gil Bachar, Keren Shlomi, Oleg Shtempluck, and Eyal Buks
Source: Journal of Microelectromechanical Systems (2014), 23(3), 563-569

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Hilbert Transform: from fundamentals to some applications

1 February, 2014

Authors: M. Feldman & S. Braun
Source: The 4th International Conference on Condition Monitoring of Machinery in Non-Stationary Operations (CMMN0'2014), Lyon (France), 2014

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A distance function for data with missing values and its application

22 October, 2013

Authors: Loai AbdAllah and Ilan Shimshoni
Source: CDMKE 2013 : International Conference on Data Mining and Knowledge Engineering

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Non parametric identification of asymmetric non linear vibration systems with the hilbert transform

17 February, 2013

Author: Michael Feldman
Source: Journal of Sound and Vibration (2012), 331, 3386-3396

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On-Fiber Optomechanical Cavity

27 October, 2012

Authors: Ilya Baskin, D.Yuvaraj, Gil Bachar, Keren Shlomi, Oleg Shtempluck, and Eyal Buks

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Nonparametric identification of asymmetric nonlinear vibration systems with the Hilbert transform

1 April, 2012

Author: Michael Feldman
Source: The biennial ISMA conference on Noise and Vibration Engineering, 2012, Conference Proceedings, Leuven, Belgium, 2012.

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Optomechanical Cavity With a Buckled Mirror

1 April, 2012

Authors: D. Yuvaraj, M. B. Kadam, O. Shtempluck & Eyal BukS
Source:Journal of Microelectromechanical Systems (2012), 22(2), 430-6

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Hilbert transform separation and analysis of multicomponent oscillations

1 March, 2012

Author: Michael Feldman
Source: 4th International Conference on Localization, Energy and Nonrmal Modes in Mechanics and Physics

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