a wafer metrology consortium under MAGNET

Metro450 Members Publications

Crystalline damage in silicon wafers and 'rare event' failure introduced by low-energy mechanical impact

30 January, 2017

Crystalline damage in silicon wafers and 'rare event' failure introduced by low-energy mechanical impact

AU: . Atrash, I. Meshi, A. Krokhmal, P. Ryan, M. Wormington, and D. Sherman

SO: Accepted for publication in: Materials Science in Semiconductor Processing