a wafer metrology consortium under MAGNET

Metro450 Members Publications

Piezo-based miniature high resolution stabilized gimbal

5 February, 2017

Piezo-based miniature high resolution stabilized gimbal

AU: Karasikov, N., Peled, G., Yasinov, R., & Yetkariov, R.

SO: SPIE Defense+ Security (pp. 982809-982809). International Society for Optics and Photonics.