a wafer metrology consortium under MAGNET

Per-Olof Gutman Publications

Time-Optimal Control of Wafer Stage Positioning using Simplified Models

7 August, 2014

Abstract: The problem of time-optimal control and optimal trajectory con-struction for wafer stage movement is considered. The problem is solved for two simplified models: (i) with control and velocity constraints and (ii) with control, velocity and jerk constraints. The solution contains jumps in the co- state variables. The structures of the solutions are demonstrated and analyzed.