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More than Metro: Enabling 450mm Silicon Wafer Metrology

Butler Auditorium of the S. Neaman at the Technion, Haifa
16 February, 2015

The registration for the third annual conference is now closed.  If you have questions, please contact Danny Nir at dn450Metro@gmail.com

The 450Metro Consortium cordially invites you to attend its third annual conference.  This year, we will address advances and directions of the 450Metro consortium, in industry and in academia. We will touch upon changes that are taking place in the semiconductor industry in general and within the metrology sector, specifically.


The 450Metro Consortium deals with metrology equipment wafer handling, computation, reduction of throughput time, standardization and micro-contamination. All of these and more are at the heart of the Israeli “Metro450” Consortium and its worldwide collaborations. Our 3rd annual conference is a great opportunity to learn more and take part of these exciting advances.

 

By invitation only

Agenda

 

 

Butler Hall – Ne’aman Institute

Time

Topic/Activity

Speaker(s)

09:00 - 09:30

Registration & Coffee

Poster session open

09:30 – 9:45

Welcome & Opening

Menachem Shoval - Metro450 Chairman

9:45 – 10:00

Office of Chief Scientist -  Magnet Program 

Ilan Peled  - Manager of the Magnet Program

10:00 – 10:20

Next Generation Technologies – Evolution or Revolution?

Prof. Yossi Shaham – Tel-Aviv University

10:20 – 10:40

Emerging Metrology Challenges

Ofer Adan - Applied Materials Israel

10:40 – 11:00

Emerging Metrology Challenges

Avron Ger – Nova Measuring Instruments

11:00 – 11:20

Poster session open

Coffee break

11:20- 11:35

Work Package 4 – Activities in the Third Year

Yuval Agami – Jordan Valley Semiconductors

11::35 – 11:50

The Challenge of Metrology Tool Calibration

Dr. Shahar Gov – Nova Measuring Instruments

11:50 – 12:05

Smart target for Metrology Tool Calibration

Hadar Mazaki – Applied Materials Israel

12:05 – 12:20

Smart target for  Metrology Tool Calibration

Marina Grinshpun – Jordan Valley Semiconductors

12:20-13:30

Lunch

Poster session open

 

 

Afternoon Breakout Sessions

 

 

Track 1 – Butler Hall, Ne’aman Institute

Track 2 – Computer Science Building Auditorium 2

Time

Topic/Activity

Speaker(s)

Time

Topic/Activity

Speaker(s)

 

Work Package 1 (Motion Control)

Work Package 2 (Algorithms)

13:30-13:40

Work Package 1 – Activities  in the third year

Dr. Nir Karasikov – Nanomotion

13:30-13:40

Work Package 2 – Activities in the third year

Dr. Boaz Cohen - AMAT

13:40-13:55

Motion challenges in 450 mm systems

Yoram Uziel – AMAT

13:40-14:00

The challenges of defect inspection

Dr. Doron Meshulach - AMAT

13:55-14:10

Novel identification of nonlinear dynamics structures via Hilbert transform

Dr. Michael Feldman – Technion

14:00-14:20

Anomaly Detection Based on Subspace Selection and Bayesian Inference

Prof Irad Ben Gal – Tel-Aviv University

14:10-14:25

A new view of anti-windup design for uncertain linear systems in the frequency domain

Ari Berger and Prof Gutman – Technion

14:20-14:40

Super-Resolution in SEM Microchip Images via Dictionary Learning

Maor Mutzafi Technion

14:25-14:40

Holding things in the air – wafer handling and frictionless bearings

Prof Yitzhak Bucher - Technion

 

 

 

 

Work Package 3 (Cleanliness)

Work Package 5 (Computing)

14:50-15:00

Work Package 3  - Activities in the third year

Amiad Conley - Applied Materials Israel

14:50-15:00

Work Package 5 – Activities in the third year

Erez Sali – Nova Measuring Instruments

15:00-15:20

Immunity to particles

Erez Admoni – Applied Materials Israel

15:00-15:20

Neural Network concept for metrology computation

Orion Talmi – Nova Measuring Instruments

15:20-15:40

In-chamber hydrocarbon contamination sensor

Prof Eyal Buks and Keren Shlomi - Technion

15:20-15:40

Hybrid design for Metrology computation

Lior Yehieli – Applied Materials Israel

15:40-16:00

Wafer breakage analysis

Prof Dov Sherman - Technion and Dr. Fouad Atrash – Jordan Valley

15:40-16:00

Accurate floating-point computations on many-core architecture

Dr. Uri Verner and Prof. Avi Mendelson - Technion

 

 

 

Butler Hall – Ne’aman Institute

Time

Topic/Activity

Speaker(s)

16:00-16:30

Poster session open

Coffee break

16:30-16:50

Plans for Metro450 – Years 4 and 5

Menachem Shoval - Metro450 Chairman

16:50-17:00

Summary, awards and prize for best project

David Nessim – Intel Israel

 

 

Click on the link below for a map of the Technion. Directions to the Neaman Institute: Enter at the West Gate. Drive straight through two traffic circles. After the second circle, the Neaman Insititute building is on your right.

Technion Map